Controlling the characteristics of implanter ion-beams

A process for manufacturing a semiconductor device, comprising:

• a. creating an ion beam comprising ions to be implanted in said device;
• b. focusing said ion beam by passing said ion beam between an upper magnetic core member, a lower magnetic core member spaced apart from said upper core member, said lower core member being oriented with its axis substantially parallel to the axis of said upper core member and its ends substantially aligned with the ends of said upper core member, and additional members connecting said ends of said magnetic core members so as to form a rectangular frame;
• where a plurality of independent current excited coil units are distributed along said upper core member and corresponding coil units are distributed along said lower core member, each said coil unit comprising a single continuous electrical circuit that surrounds an individual core member;
• c. exciting said coil units distributed along said upper core member and said corresponding coil units distributed along said lower core member such that the direction of the current in each of said excited coil units distributed along said upper core member is the opposite of the direction of the current in said corresponding coil units distributed along said lower core member when viewed from one end of the upper and lower core members;
• and
• d. directing said focused beam onto said device.

A process for manufacturing a semiconductor device, comprising:

• a. creating an ion beam comprising ions to be implanted in said device;
• b. focusing said ion beam by passing said ion beam between an upper magnetic core member and a lower magnetic core member spaced apart from said upper core member, said lower core member being oriented with its axis substantially parallel to the axis of said upper core member, wherein a plurality of focusing coil units are distributed along said upper core member and corresponding focusing coil units are distributed along said lower core member, each said focusing coil unit comprising a single continuous electrical circuit that surrounds an individual core member;
• c. exciting one of said focusing coil units distributed along said upper core member and its corresponding focusing coil unit distributed along said lower core member such that the direction of the current in said one excited focusing coil unit distributed along said upper core member is the opposite of the direction of the current in said corresponding focusing coil unit distributed along said lower core member when viewed from one end of the upper and lower core members;
• and
• d. directing said focused beam onto said device.