Apparatus and method for providing thermal conductance in thermally responsive photonic imaging devices

A sensing array, comprising a plurality of sensing elements each sensing element, comprising:

• a dielectric layer;
• a first electrode disposed between the sensing element and the dielectric layer, the dielectric layer contacting only one side of the first electrode;
• a second electrode positioned in a facing spaced relationship with respect to the dielectric layer, the second electrode being disposed within a receiving area defined by a substrate, wherein a portion of the dielectric layer is supported by a periphery of the receiving area;
• and
• wherein an applied voltage to the second electrode attracts the first electrode towards the second electrode and the dielectric layer moves toward the second electrode, wherein a path of thermal conductance is provided between the substrate and the sensing element through the first electrode, wherein the first electrode and the dielectric layer return to the facing spaced relationship when the applied voltage is removed from the second electrode, wherein the array is configured to allow each sensing element to independently be moved towards the substrate, wherein the path of thermal conductance increases the sensing elements response to radiation.

A method of providing an intermittent thermal conductance path in an infrared sensor, comprising:

• disposing a sensing element on a first electrode, the first electrode being positioned on a dielectric layer, the dielectric layer contacting only one side of the first electrode;
• disposing a second electrode within a receiving area defined by a substrate, wherein a portion of the dielectric layer is supported by a periphery of the receiving area, wherein the second electrode is positioned in a facing spaced relationship with respect to the dielectric layer;
• and
• providing a thermal conductance path from the sensing element to the substrate by applying a voltage to the second electrode, wherein the first electrode is pulled towards the second electrode and wherein the first electrode and the dielectric layer return to the facing spaced relationship when the applied voltage is removed from the second electrode.

A method for providing an intermittent thermal conductance path in a thermal sensing array, the method comprising:

• disposing a plurality of sensing elements on a plurality of first electrodes, the plurality of first electrodes each being positioned on a respective one of a plurality of dielectric layers, each of the dielectric layers contacting only one side of a respective one of the plurality of first electrodes;
• disposing each of a plurality of second electrodes within a receiving area defined by a substrate, wherein a portion of each of the plurality of dielectric layers is supported by a periphery of the receiving area, wherein the plurality of second electrodes are positioned in a facing spaced relationship with respect to a respective one of the plurality of dielectric layers;
• and
• intermittingly providing an increased thermal conductance path between a first portion of the plurality of sensing elements and the substrate and a second portion of the plurality of sensing elements and the substrate, wherein the increased thermal conductance path between the first portion of the plurality of sensing elements and the substrate is provided through a first portion of the plurality of second electrodes by changing a voltage drop between a first portion of the plurality of first electrodes and the first portion of the plurality of second electrodes, wherein a distance between the first portion of the plurality of first electrodes and the first portion of the plurality of second electrodes decreases;
• and
• wherein the increased thermal conductance path between the second portion of the plurality of sensing elements and the substrate is provided through a second portion of the plurality of second electrodes by changing a voltage drop between a second portion of the plurality of first electrodes and the second portion of the plurality of second electrodes, wherein a distance between the second portion of the plurality of first electrodes and the second portion of the plurality of second electrodes decreases.