Electron beam inspection system and inspection method and method of manufacturing devices using the system

A multi-purpose electron beam inspection system comprising:

• a primary electron optical system for irradiating a primary electron beam emitted from an electron gun to a surface of a sample to be inspected;
• a deflector for scanning said sample surface with said primary electron beam;
• a secondary electron optical system for magnifying and projecting an image of secondary electrons emitted from said sample;
• a first detector for generating an image signal on a basis of said magnified and projected image of secondary electrons, said first detector detecting a defect and outputting a defect position;
• and
• a second detector for generating an image signal as an SEM image on a basis of secondary electrons emitted from said sample by irradiating said primary electron beam to said sample surface, said second detector inspecting the defect position.