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US 7,351,607 B2Granted
Large scale patterned growth of aligned one-dimensional nanostructures
AssigneeGeorgia Tech Research Corporation
InventorsZhong L. Wang, Christopher J. Summers, Xudong Wang, Elton D. Graugnard, Jeffrey King
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Abstract
A method of making nanostructures using a self-assembled monolayer of organic spheres is disclosed. The nanostructures include bowl-shaped structures and patterned elongated nanostructures. A bowl-shaped nanostructure with a nanorod grown from a conductive substrate through the bowl-shaped nanostructure may be configured as a field emitter or a vertical field effect transistor. A method of separating nanoparticles of a desired size employs an array of bowl-shaped structures.
Claims10
A method of making a bowl-shaped structure, comprising the steps of:
- a. placing an organic sphere onto a top surface of a substrate;
- b. applying a metal oxide to the organic sphere, thereby forming a metal oxide shell;
- c. removing a portion of the metal oxide shell and a corresponding portion of the organic sphere while leaving a remaining portion of the organic sphere and a remaining portion of the metal oxide shell;
- and
- d. removing the remaining portion of the organic sphere, thereby leaving a bowl-shaped structure that has an interior shape that is complimentary in shape to the remaining portion of the organic sphere.
2 more elements
Dependencies are inferred from the claim text.