Microstructures
AssigneeInternational Business Machines Corporation
InventorsGraham Cross, Michel Despont, Urs T. Duerig, Grégoire Genolet, Reto Schlittler, Peter Vettiger
Life of this patent
Estimating the term…
Abstract
A method for forming a microstructures is described. The method comprises: depositing a seed material on a substrate; growing a nanotube from the seed material; depositing microstructure material on the substrate to embed the nanotube in the microstructure material; and, detaching the substrate to release the microstructure. The resulting mictostructure comprises a body portion and a nanotube embedded in the body portion.
Claims26
A method for forming a microstructure, comprising:
- depositing a seed material on a substrate;
- growing a nanotube from the seed material;
- depositing microstructure material on the substrate to embed the nanotube in the microstructure material, wherein the microstructure material comprises a different material from the nanotube;
- and
- detaching the substrate to release the microstructure, wherein detaching comprises depositing a sacrificial layer comprising an anode sub-layer and a cathode sub-layer on a surface of the substrate prior to deposition of the microstructure material.
A method for forming a microstructure, comprising:
- depositing a seed material on a substrate;
- growing a nanotube from the seed material;
- depositing microstructure material on the substrate to embed the nanotube in the microstructure material;
- and
- detaching the substrate to release the microstructure, wherein detaching comprises:
- depositing a sacrificial layer formed of a different material form the microstructure material on a surface of the substrate prior to deposition of the microstructure material;
- and
- immersing the sacrificial layer in an electrolyte after deposition of the microstructure material.
A method for forming a microstructure, comprising:
- depositing a seed material on a substrate;
- growing a nanotube from the seed material;
- depositing microstructure material on the substrate to embed the nanotube in the microstructure material;
- and
- detaching the substrate to release the microstructure, wherein detaching comprises depositing a sacrificial layer formed of a different material from the microstructure material on a surface of the substrate prior to deposition of the microstructure material.
Dependencies are inferred from the claim text.