Positive resist composition and pattern-forming method using the same
AssigneeFUJIFILM Corporation
InventorsShoichiro Yasunami, Kenji Wada, Kunihiko Kodama, Kenichiro Sato
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AssigneeFUJIFILM Corporation
InventorsShoichiro Yasunami, Kenji Wada, Kunihiko Kodama, Kenichiro Sato
Estimating the term…
A positive resist composition includes: (A) a resin capable of increasing a solubility thereof in an alkali developer by an action of an acid; (B) a compound capable of generating a sulfonic acid represented by the following formula (I) upon irradiation with one of an actinic ray and a radiation; and (C1) at least one of an amine compound having at least an aliphatic hydroxyl group in a molecule and an amine compound having at least an ether bond in a molecule: A1A2-SO3H)n (I) wherein A1 represents an n-valent linking group, A2 represents a single bond or a divalent aliphatic group, and A2's each may be the same or different, provided that at least one group represented by A1 or A2 contains a fluorine atom, and n represents an integer of from 2 to 4.
A positive resist composition comprising:
Dependencies are inferred from the claim text.