Shock absorbing fluidic actuator
AssigneeASML Holding N.V.
InventorAndrew P. Nguyen
Life of this patent
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Abstract
According to one aspect of the invention, a fluidic actuator and a control system for the fluidic actuator may be provided. A first component of the actuator may have two openings interconnected by a passageway. A second component may be moveably housed within the passageway and divide the passageway into two portions. A fluid delivery system may be connected to the two openings. The fluid delivery system may supply a first pressure of fluid to the first portion of the passageway causing the second component to move within the passageway at a first speed. When the second component is in a selected position within the passageway, the fluid delivery system may reduce the pressure of the fluid, causing a reduction in speed of the second component. The fluidic actuator may be used in a wafer processing system.
Claims17
An apparatus comprising:
- an actuator having a first component with at least one opening and a passageway therein connected to the at least one opening and a second component housed within the passageway being movable between first and second positions within the passageway, the second component dividing the passageway into first and second portions and sealing the first portion from the second portion;
- at least one sensor to detect a position of the second component within the passageway;
- and
- a pump system having at least one pump and a controller, the at least one pump being connected to the at least one opening supplying a fluid to the first portion of the passageway, the fluid applying a first force onto the second component, moving the second component between the first and second positions at a first speed, the controller being connected to the at least one pump and the at least one sensor, the controller controlling the at least one pump to change the supply of fluid to the first portion of the passageway to apply a second force onto the second component, moving the second component between the first and second positions at a second speed,
- wherein the first component of the actuator has first and second openings, the passageway interconnects the first and second openings, and
- wherein the at least one pump is connected to the first and second openings and further comprising a switch interconnecting the at least one pump and the first component, the controller being connected to the switch, and
- wherein the controller controls the switch to change the supply of fluid between the first opening and the second opening when the piston is in the second position.
A semiconductor substrate processing apparatus comprising:
- a frame;
- a substrate support mounted to the frame to support a semiconductor substrate;
- a dispense arm mounted to the frame for movement relative to the substrate support;
- a dispense arm actuator having a first component with at least one opening and a passageway therein connected to the at least one opening and a second component housed within the passageway being movable between first and second positions within the passageway, the second component dividing the passageway into first and second portions and sealing the first portion from the second portion, at least one of the components being connected to the frame and at least one of the components being connected to the dispense arm;
- at least one sensor coupled to the dispenser arm actuator to detect a position of the second component within the passageway;
- and
- a pump system having a pump and a controller, the pump being connected to the at least one opening and supplying a fluid to the first portion of the passageway, the fluid applying a first force onto the second component to move the second component between the first and second positions at a first speed, the controller being connected to the pump and the at least one sensor, the controller controlling the pump to change the supply of fluid to the first portion of the passageway, when the second component is in a selected position within the passageway, to apply a second force onto the second component to move the second component between the first and second positions at a second speed, the second component stopping in the second position in the passageway,
- wherein the first component of the dispense arm actuator has first and second openings, the passageway interconnects the first and second openings, and wherein the pump is connected to the first and second openings and further comprising a switch interconnecting the pump and the first component, the controller being connected to the switch, and wherein the controller controls the switch to change the supply of fluid between the first opening and the second opening when the piston is in the second position.
Dependencies are inferred from the claim text.