Scanning type probe microscope and probe moving control method therefor

A probe tip movement control method in a scanning probe microscope provided with a probe tip part having a probe tip facing a sample, a measurement part for measuring a physical quantity occurring between said probe tip and said sample when said probe tip scans the surface of said sample, and a movement mechanism relatively changing the positions of said probe tip and said sample and having at least two degrees of freedom, said measurement part maintaining said physical quantity constant while said movement mechanism making said probe tip scan the surface of said sample so as to measure the surface of said sample,

• said probe tip movement control method comprising the step of changing an approach direction of said probe tip when a movement direction with which said probe tip approaches the sample surface and a reaction force direction when said probe tip contacts the sample surface differ by at set value or more.