Adjusting manufacturing process control parameter using updated process threshold derived from uncontrollable error

A computer program product for controlling a manufacturing process, the computer program product comprising:

• (a) at least one computer readable medium;
• (b) instructions, provided on the at least one computer readable medium, for inputting a model for the manufacturing process and obtaining a manufacturing recipe based on the model, wherein the model predicts at least one value for a product characteristic of at least one product processed by the manufacturing process;
• (c) instructions, provided on the at least one computer readable medium, for receiving at least one observed value for the product characteristic of the at least one product and calculating a variance between the at least one observed value and the at least one predicted value;
• (d) instructions, provided on the at least one computer readable medium, for calculating value for uncontrollable error from the variance;
• (e) instructions, provided on the at least one computer readable medium, for updating a process threshold based upon the value for uncontrollable error;
• and
• (f) instructions, provided on the at least one computer readable medium, for adjusting at least one control parameter of the manufacturing process using the undated process threshold,
• wherein the manufacturing process includes at least one device on which the at least one product is processed, the at least one device being affected by the at least one control parameter.

A system for controlling a manufacturing process, comprising:

• (a) means for inputting a model for the manufacturing process and obtaining a manufacturing recipe based on the model, wherein the model predicts at least one value for a product characteristic of at least one product processed by the manufacturing process;
• (b) means for receiving at least one observed value for the product characteristic of the at least one product and determining a variance between the at least one observed value and the at least one predicted value;
• (c) calculating means for determining a first portion of the variance caused by uncontrollable error and a second portion of the variance caused by controllable error;
• (d) calculating means for updating a process threshold using either the first or second portion of the variance;
• and
• (e) means for adjusting at least one control parameter of the manufacturing process using the updated process threshold;
• wherein the manufacturing process comprises at least one device on which the at least one product is processed, the at least one device being affected by the at least one control parameter.