Photosensitive composition, compound for use in the photosensitive composition, and pattern forming method using the photosensitive composition
AssigneeFUJIFILM Corporation
InventorsKenji Wada, Kunihiko Kodama
Life of this patent
Estimating the term…
Abstract
A photosensitive composition comprising a compound capable of generating a specific sulfonic acid upon irradiation with actinic rays or a radiation; a compound capable of generating a specific sulfonic acid upon irradiation with an actinic ray or a radiation; and a pattern forming method using a photosensitive composition comprising a compound capable of generating a specific sulfonic acid upon irradiation with an actinic ray or a radiation.
Claims31
A photosensitive composition comprising (A) a compound capable of generating a sulfonic acid, the sulfonic acid being represented by formula (I) upon irradiation with one of an actinic ray and a radiation:
- wherein
- Rf represents an organic group having a fluorine atom,
- R represents a hydroxyl group or an organic group,
- Ar represents an aromatic group,
- l represents an integer of 2 to 5,
- m represents an integer of 0 to 4, and
- n represents an integer of 0 to 4,
- provided that m+n represents an integer of 1 or more.
A compound (A) capable of generating a sulfonic acid, the sulfonic acid being represented by formula (I) upon irradiation with one of an actinic ray and a radiation:
- wherein
- Rf represents an organic group having a fluorine atom,
- R represents a hydroxyl group or an organic group,
- Ar represents an aromatic group,
- l represents an integer of 2 to 5,
- m represents an integer of 0 to 4, and
- n represents an integer of 0 to 4,
- provided that m+n represents an integer of 1 or more.
A compound represented by formula (I) or a salt thereof:
- wherein
- Rf represents an organic group having a fluorine atom,
- R represents a hydroxyl group or an organic group,
- Ar represents an aromatic group,
- l represents an integer of 2 to 5,
- m represents an integer of 0 to 4, and
- n represents an integer of 0 to 4,
- provided that m+n represents an integer of 1 or more.
A compound represented by any one of formulae (A1) to (A5):
- wherein
- in formula (A1),
- R201, R202 and R203 each independently represents an organic group, and
- X− represents a sulfonate anion resulting from removal of the hydrogen atom from a sulfonic acid (—SO3H) of formula (I);
- in formula (A2),
- R204 and R205 each independently represents an aryl group, an alkyl group or a cycloalkyl group, and
- X− represents a sulfonate anion resulting from removal of the hydrogen atom from a sulfonic acid (—SO3H) of formula (I);
- in formula (A3),
- A represents an alkylene group, an alkenylene group or an arylene group, and
- X1 represents a monovalent group resulting from removal of the hydrogen atom from a sulfonic acid (—SO3H) of formula (I);
- in formula (A4),
- R208 represents an alkyl group or an aryl group,
- R209 represents an alkyl group, a cyano group or an alkoxycarbonyl group, and
- X1 represents a monovalent group resulting from removal of the hydrogen atom from a sulfonic acid (—SO3H) of the following formula (I);
- and
- in formula (A5),
- R210 and R211 each independently represents a hydrogen atom, an alkyl group, a cyano group, a nitro group or an alkoxycarbonyl group,
- R212 represents a hydrogen atom, an alkyl group, a cyano group or an alkoxycarbonyl group, and
- X1 represents a monovalent group resulting from removal of the hydrogen atom from a sulfonic acid (—SO3H) of formula (I):
- wherein
- Rf represents an organic group having a fluorine atom,
- R represents a hydroxyl group or an organic group,
- Ar represents an aromatic group,
- l represents an integer of 2 to 5,
- m represents an integer of 0 to 4, and
- n represents an integer of 0 to 4,
- provided that m+n represents an integer of 1 or more.
A positive photosensitive composition comprising:
- (A) a compound capable of generating a sulfonic acid, the sulfonic acid represented by formula (I) upon irradiation with one of an actinic ray and a radiation:
- wherein
- Rf represents an organic group having a fluorine atom,
- R represents a hydroxyl group or an organic group,
- Ar represents an aromatic group,
- l represents an integer of 2 to 5,
- m represents an integer of 0 to 4, and
- n represents an integer of 0 to 4,
- provided that m+n represents an integer of 1 or more;
- and
- (B) a resin capable of decomposing under the action of an acid to increase a solubility of the resin in an alkali developer.
A positive photosensitive composition comprising:
- (A) a compound capable of generating a sulfonic acid, the sulfonic acid represented by formula (I) upon irradiation with one of an actinic ray and a radiation:
- wherein
- Rf represents an organic group having a fluorine atom,
- R represents a hydroxyl group or an organic group,
- Ar represents an aromatic group,
- l represents an integer of 2 to 5,
- m represents an integer of 0 to 4, and
- n represents an integer of 0 to 4,
- provided that m+n represents an integer of 1 or more;
- (D) a resin soluble in an alkali developer;
- and
- (C) a dissolution inhibiting compound capable of decomposing under the action of an acid to increase a solubility of the dissolution inhibiting compound in an alkali developer, the dissolution inhibiting compound having a molecular weight of 3,000 or less.
A negative photosensitive composition comprising:
- (A) a compound capable of generating a sulfonic acid, the sulfonic acid represented by formula (I) upon irradiation with one of an actinic ray and a radiation:
- wherein
- Rf represents an organic group having a fluorine atom,
- R represents a hydroxyl group or an organic group,
- Ar represents an aromatic group,
- l represents an integer of 2 to 5,
- m represents an integer of 0 to 4, and
- n represents an integer of 0 to 4,
- provided that m+n represents an integer of 1 or more;
- (D) a resin soluble in an alkali developer;
- and
- (E) an acid crosslinking agent capable of crosslinking with the alkali developer-soluble resin under the action of an acid.
Dependencies are inferred from the claim text.