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AssigneeResearch Foundation of the University of Central Florida
InventorsJayanta S. Kapat, Linan An, Sanjeev Bharani
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Novel micro electro mechanical systems (MEMS)-based sensors for use in ultra-high temperature environments are disclosed. The MEMS-based sensors are derived from a class of polymer-derived ceramics selected from the group consisting of SiCN, SiBCN and SiAlCN. The materials of construction are such that, the sensors are capable of accurate, real-time, on-line and in-situ monitoring, suppression of combustion oscillations and detailed measurements in operating structures that have temperatures of from about 1500° K to about 2000° K, extreme pressures/turbulence and harsh chemical off gases. When the novel sensors are mounted on a hot gas path wall, such as, at a combustor exit, there can be a continuous monitoring of pressure pulses/oscillations, wall shear stress, temperature and surface heat flux.
A process for producing a series of micro electro mechanical system (MEMS)-based sensors for high temperature flow path applications wherein sensors are fabricated with polymer derived ceramics (PDCs), comprising the steps of:
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