Method for manufacturing a shielded pole magnetic head for perpendicular recording
AssigneeWestern Digital (Fremont), LLC
InventorsKroum S. Stoev, Francis H. Liu, Yugang Wang
Life of this patent
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Abstract
A method of making a perpendicular magnetic recording head for use in a data storage device includes forming a first pole layer, a second pole layer, a third pole layer, and a shield layer of a write section. The first pole layer, second pole layer, third pole layer, and shield layer are formed without using a chemical mechanical polishing process. The method next includes concurrently trimming the shield layer and a write pole that is defined by the third pole layer to a predetermined track width. In the trimming step, the shield layer is used as a mask for the write pole.
Claims14
A method of making a perpendicular magnetic recording head for use in a data storage device, comprising:
- forming a first pole layer, a second pole layer, a third pole layer, and a shield layer of a write section, without using a chemical mechanical polishing process;
- and
- then concurrently trimming the shield layer and a write pole that is defined by the third pole layer, to a predetermined track width, wherein the shield layer is used as a mask for the write pole.
A method of making a perpendicular magnetic recording head for use in a data storage device, comprising:
- forming a first pole layer, a second pole layer, a third pole layer, and a shield layer of a write section, without using a chemical mechanical polishing process;
- concurrently trimming the shield layer and a write pole that is defined by the third pole layer, to a predetermined track width, wherein the lower portion of the shield layer is used as a mask for the write pole;
- depositing a high moment material atop a write gap formed between the lower portion of the shield layer and the third pole layer;
- and
- forming an upper portion of the shield layer.
Dependencies are inferred from the claim text.