Firing container for silicon nitride ceramics
AssigneeAsahi Glass Company, Limited
InventorsKeiichiro Suzuki, Masakatsu Fujisaki, Yuji Shimao, Satoshi Ogaki
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Abstract
A firing container for silicon nitride ceramics, which is a hermetically sealed container having a gas inlet and a gas outlet, characterized in that the interior of the hermetically sealed container is partitioned by a gas supply chamber partition plate into a gas supply chamber communicating with the gas inlet, and a firing chamber to accommodate an object to be heat-treated and communicating with the gas outlet, and the gas supply chamber partition plate has vent holes selectively formed in the vicinity of its periphery.
Claims9
A firing container for silicon nitride ceramics, which is a hermetically sealed container having a gas inlet and a gas outlet, characterized in that the interior of the hermetically sealed container is partitioned by a gas supply chamber partition plate into a gas supply chamber communicating with the gas inlet, and a firing chamber to accommodate an object to be heat-treated and communicating with the gas outlet, and the gas supply chamber partition plate has vent holes selectively formed in the vicinity of its periphery,
- wherein the interior of the firing chamber is partitioned by a firing chamber partition plate into two or more compartments, and the firing chamber partition plate has vent holes formed in the vicinity of its periphery.
Dependencies are inferred from the claim text.