Micro-electromechanical structure with improved insensitivity to thermomechanical stresses induced by the package

A micro-electromechanical device, comprising:

• a semiconductor material substrate;
• a plurality of anchoring elements coupled to the substrate, one of the plurality being located at a centroidal axis of the device exten&ng substantially perpendicular to a plane defined by an upper face of the substrate, the remainder of the plurality being located in the proximity of the centroidal axis of the device;
• a rotor lying in a spaced-apart relationship with respect to a surface of the substrate and movably coupled to the substrate by a first spring element extending between the rotor and one of the plurality of anchoring elements, the rotor being sized and positioned to surround the plurality of anchoring elements;
• and
• a stator lying in a spaced-apart relationship with respect to a surface of the substrate and coupled to the substrate by another one of the plurality of anchoring elements.

A device comprising:

• a semiconductor substrate;
• a single rotor anchor coupled to the substrate at a centroidal axis of the device;
• a rotor movably coupled to the substrate via the single rotor anchor, only, and having a plurality of rotor electrodes;
• a plurality of stator anchors coupled to the substrate substantially equidistant from the rotor anchor;
• a stator coupled to the plurality of stator anchors and having a plurality of stator electrodes, each of the plurality of stator anchors being positioned closer to the rotor anchor than any stator electrode;
• and
• means for reducing sensitivity of the device to dilatation thereof.

A micro-electromechanical device, comprising:

• a semiconductor material substrate;
• a plurality of anchoring elements coupled to the substrate in the proximity of a centroidal axis of the device;
• a rotor lying in a spaced-apart relationship with respect to a surface of the substrate and movably coupled to the substrate by a plurality of spring elements extending between the rotor and one of the plurality of anchoring elements, the rotor being sized and positioned to surround the plurality of anchoring elements;
• a stator lying in a spaced-apart relationship with respect to a surface of the substrate and coupled to the substrate by another one of the plurality of anchoring elements;
• a first plurality of rotor electrodes, each lying parallel to a first axis and extending from the rotor toward the stator from a first side of the rotor;
• a second plurality of rotor electrodes, each lying parallel to the first axis and extending from the rotor toward the stator from a second side of the rotor;
• a third plurality of rotor electrodes, each lying parallel to a second axis and extending from the rotor toward the stator from a third side of the rotor;
• a fourth plurality of rotor electrodes, each lying parallel to the second axis and extending from the rotor toward the stator from a fourth side of the rotor;
• a first plurality of stator electrodes, each lying parallel to the first axis and extending from the stator toward the rotor in a substantially side-by-side relationship with a respective one of the first plurality of rotor electrodes;
• a second plurality of stator electrodes, each lying parallel to the first axis and extending from the stator toward the rotor in a substantially side-by-side relationship with a respective one of the second plurality of rotor electrodes;
• a third plurality of stator electrodes, each lying parallel to the second axis and extending from the stator toward the rotor in a substantially side-by-side relationship with a respective one of the third plurality of rotor electrodes;
• and
• a fourth plurality of stator electrodes, each lying parallel to the second axis and extending from the stator toward the rotor in a substantially side-by-side relationship with a respective one of the fourth plurality of rotor electrodes.

A device comprising:

• a semiconductor substrate;
• a single rotor anchor coupled to the substrate at a centroidal axis of the device;
• a rotor movably coupled to the substrate via the single rotor anchor, only, and having a plurality of rotor electrodes;
• first and second stator anchors coupled to the substrate substantially equidistant from the rotor anchor;
• and
• two stator elements, only, for a first axis of detection of the device, each coupled to a respective one of the first and second stator anchors and having a plurality of stator electrodes.