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US 7,321,048 B2Granted
Organometallic compound purification
AssigneeRohm and Haas Electronic Materials LLC
InventorsDeodatta Vinayak Shenai-Khatkhate, Ronald L. DiCarlo, Jr.
Life of this patent
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Abstract
A method of purifying an organometallic compound by heating the organometallic compound in the presence of a trialkyl aluminum compound and a catalyst.
Claims10
A method of purifying an organometallic compound comprising i) providing a mixture comprising a) an organometallic compound chosen from unsymmetrical dimethyl hydrazine and a compound of the formula R1R2n−1M1 wherein R1 is chosen from (C1-C20)alkyl, (C2-C12)dialkylamino, (C1-C12)alkylamino(C1-C12)alkyl, di(C1-C20)alkylamino(C1-C12)alkyl, (C2-C20)alkenyl, (C2-C20)alkynyl and aryl;
- each R2 is independently chosen from hydrogen, (C1-C20)alkyl, (C2-C12)dialkylamino, (C1-C12)alkylamino(C1-C12)alkyl, di(C1-C20)alkylamino(C1-C12)alkyl, (C2-C20)alkenyl, (C2-C20)alkynyl, aryl and halogen;
- M1 is a Group IIA to Group VIA metal;
- and n is the valence of M1;
- and b) a purifying composition comprising an alkyl-metal compound of the formula R3xR43-xM2 wherein R3 is a (C1-C20)alkyl;
- each R4 is independent chosen from hydrogen and halogen;
- M2 is a Group IIIA metal;
- and x is an integer from 1-3;
- and a catalyst compound;
- and ii) heating the mixture.
6 more elements
Dependencies are inferred from the claim text.