Management system for semiconductor manufacturing equipment
AssigneeSamsung Electronics Co., Ltd.
InventorsJin-Woo Park, Hong-Jin Park, Hyoung-Min Park, Young-Hak Hwang, Yong-Bum Park
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Abstract
A management system for semiconductor manufacturing equipment in a manufacturing facility is provided. The system includes a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a radio tag associated with a wafer cassette. The tracking server is adapted to receive status information from the radio tag via the wireless network, to derive location or movement information for the wafer cassette from the status information, and to determining an optimal transfer path for the wafer cassette through the manufacturing facility.
Claims18
A management system for semiconductor manufacturing equipment in a manufacturing facility, the system comprising:
- a host computer communicating with a tracking server, the tracking server communicating with a wireless network adapted to communicate with a ZigBee wireless communication system compatible radio tag associated with a wafer cassette, wherein the wireless network comprises a ZigBee coordinator connected to the tracking server and a plurality of ZigBee routers wirelessly connected to the ZigBee coordinator and wirelessly communicating with the radio tag;
- wherein the tracking server status information from the radio tag via the wireless network, derives location or movement information for the wafer cassette from the status information, and determines an optimal transfer path for the wafer cassette through the manufacturing facility.
Dependencies are inferred from the claim text.