US 7,310,150 B2 · Apparatus and method for low coherence ranging

Abstract

A system, apparatus and method for performing low coherence ranging of a sample with high transverse resolution and large depth of focus can be provided. For example, an optical ranging system including a light source can be used. Certain exemplary arrangement can be provided, e.g., a first arrangement for directing light from the light source to the sample, a second arrangement for directing reflected light from the sample to a detector, at least one detector, and a third arrangement for processing light data received by the detector and which generates an image can be utilized. Further, for example, an optical element can be provided which can have a transverse resolution defined as .Δris less than or equal to about μ5 m, and a depth of focus Δz of at least about 50 μm.

Claims60

Dependent claims

An apparatus for imaging at least a portion of a sample, comprising:

a first interferometric arrangement providing an electro-magnetic radiation;
and
a second arrangement configured to receive the electro-magnetic radiation, and configured to generate a resultant electro-magnetic intensity distribution,
wherein, along a particular direction, the intensity distribution is approximately constant for at least a predetermined distance, and wherein a wavelength of the electro-magnetic radiation remains approximately the same for at least the predetermined distance at which the intensity distribution is approximately constant.

1 more element

Dependencies are inferred from the claim text.

Apparatus and method for low coherence ranging

Life of this patent

Apparatus and method for low coherence ranging

Life of this patent

Abstract

Claims60