Fluidic MEMS device
AssigneeHewlett-Packard Development Company, L.P.
InventorsChien-Hua Chen, Xia feng Yang
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Abstract
A fluidic micro electro-mechanical system (MEMS) device is described. In one aspect, at least one at least partially covered fluidic channel is formed between a polymer layer and a polymer substrate as the polymer layer is deposited on the substrate. The partially covered fluidic channel is fabricated as a unitary polymer layer structure. In one implementation, a strong exposure process is applied to the polymer layer to create a deep cross-linked polymer region. A weak exposure process is applied to the polymer layer to create a shallow cross-linked polymer region.
Claims13
An apparatus, comprising:
- a fluidic Micro Electro-Mechanical System (MEMS) comprising a polymer layer joined to a substrate portion, the polymer layer of the apparatus comprising:
- a containment portion that in combination with the substrate defines a fluidic channel, wherein the containment portion includes a deep cross-linked polymer region and a shallow cross-linked polymer region, and
- wherein the deep cross-linked polymer region and the shallow cross-linked polymer region of the containment portion are formed as a unitary structure.
Dependencies are inferred from the claim text.