Gas measuring method inside a sealed container
AssigneesCanon Kabushiki Kaisha, Kabushiki Kaisha Toshiba
InventorsMasaru Kamio, Yasue Sato, Kazuyuki Seino, Hiromasa Mitani
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Abstract
A gas measuring method performs a gas measurement inside a sealed container provided with a pair of plates and an exhaust pipe having a breakable vacuum isolating member on at least one of the plates. The method includes the steps of connecting the sealed container to a gas measuring apparatus through the exhaust pipe, and breaking the breakable vacuum isolating member.
Claims4
A gas measuring method of performing a gas measurement inside a sealed container provided with a pair of plates and an exhaust pipe having a breakable vacuum isolating member on at least one of the plates, said method comprising the steps of connecting the sealed container to a gas measuring apparatus through the exhaust pipe, and breaking the breakable vacuum isolating member.
Dependencies are inferred from the claim text.