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US 7,308,329 B2Granted
Method and apparatus for inspecting semiconductor wafer
AssigneeOlympus Corporation
InventorsYasunori Ikeno, Yasutoshi Kitahara, Shunsuke Kurata, Yoshiaki Suge
Life of this patent
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Abstract
A substrate inspection apparatus includes a recipe preparation unit that batch-allocates a plurality of slots containing substrates of each type with a corresponding one of a plurality of original recipes to the each type, the plurality of original recipes corresponding to different types of substrates respectively, so as to prepare an actual recipe based on the plurality of original recipes, and to inspect the different types of substrates according to the actual recipe.
Claims12
A substrate inspection apparatus comprising:
- a recipe preparation unit that:
- (i) obtains a plurality of original recipes which correspond to plural substrate types respectively, the plurality of original recipes corresponding to a plurality of original process units respectively, and (ii) allocates parts of the plurality of original recipes to a group of slots and prepares an actual recipe based on the plurality of original recipes, wherein the group of slots belong to an actual process unit different from the original process units, the group of slots contain substrates of the plural substrate types, at least one of the plural substrate types comprises plural substrates, and the plural substrate types of the plurality of original recipes correspond to the plural substrate types of the substrates contained in the group of slots;
- and
- a substrate inspection unit that inspects substrates belonging to the actual process unit with reference to the actual recipe.
1 more element
A method of inspecting substrates, the method comprising:
- selecting one of a plurality of allocation modes that have previously been given;
- obtaining different types of substrates and a relationship in correspondence between a plurality of slots and the different types of substrates, the plurality of slots comprising sub-pluralities of slots that correspond to the different types of substrates, respectively;
- obtaining a plurality of original recipes that correspond to the different types of substrates, respectively;
- and
- batch-allocating each of the sub-pluralities of slots with a corresponding one of the plurality of original recipes, so as to prepare an actual recipe based on the plurality of original recipes and to inspect the substrates according to the actual recipe.
2 more elements
Dependencies are inferred from the claim text.