Arc detection and handling in radio frequency power applications

A radio frequency power delivery system, comprising:

• a) an RF power generator, wherein the RF power generator provides a measured value of a parameter related to power transfer from the RF power generator to a plasma load;
• b) arc detection circuitry that computes a dynamic boundary about the value of the parameter;
• and
• c) controller logic responsive to the arc detection circuitry, wherein the controller logic indicates an occurrence of an arc within the plasma load if a subsequent value of the parameter exceeds the dynamic boundary.

A plasma processing system, comprising:

• a) a plasma processing chamber;
• b) an RE power generator that delivers RF power to a plasma in the plasma processing chamber;
• c) arc detection circuitry that computes a dynamic boundary about the value of the parameter;
• and
• d) controller logic responsive to the arc detection circuitry, wherein the controller logic indicates an occurrence of an arc if a subsequent value of the parameter exceeds the dynamic boundary.