X-ray generating equipment
AssigneeShimadzu Corporation
InventorMasaaki Ukita
Life of this patent
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Abstract
An X-ray generating apparatus for generating X-rays by irradiating a target with an electron beam. Wherein the apparatus includes a vibration applying means for vibrating the target in directions parallel to a surface thereof. A colliding spot of the electron beam is movable on the target while maintaining an X-ray focus in the same position on the electron beam without fluctuating the X-ray focal position. This enlarges an actual area of electron collision on the target to disperse the generated heat, thereby to suppress a local temperature rise of the target due to the electron collision. The X-ray generating apparatus is compact, and has a long life and a high X-ray intensity.
Claims16
An apparatus for generating X-rays by irradiating a target with an electron beam, comprising:
- an electron gun operative for emitting electrons;
- an electron lens having a bore extending therethrough for receiving and converging the emitted electrons;
- vibration applying means for vibrating said target in directions parallel to a surface thereof, the vibration applying means disposed within the bore and connected to the electron lens;
- a holder connected to the vibration applying means and operative to hold the target within or adjacent the bore;
- and
- a vacuum vessel operative for containing the electron gun, the electron lens, the vibration applying means and the target in a vacuum.
Dependencies are inferred from the claim text.