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US 7,299,106 B1Granted
Method and apparatus for scheduling metrology based on a jeopardy count
AssigneeAdvanced Micro Devices, Inc.
InventorsCabe W. Nicksic, Matthew A. Purdy
Life of this patent
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Abstract
The present invention provides a method that includes determining a jeopardy count associated with at least one processing tool and selecting at least one wafer based upon the jeopardy count, the at least one wafer having been processed by the at least one processing tool.
Claims23
A method, comprising:
- determining a jeopardy count associated with at least one processing tool;
- and
- providing at least one wafer to a metrology tool based upon the jeopardy count, the at least one wafer having been processed by the at least one processing tool, wherein providing the at least one wafer comprises determining a priority associated with the at least one wafer based on the jeopardy count associated with the at least one wafer.
An apparatus, comprising:
- means for determining a jeopardy count associated with at least one processing tool;
- and
- means for providing at least one wafer to a metrology tool based upon the jeopardy count, the at least one wafer having been processed by the at least one processing tool, wherein providing the at least one wafer comprises determining a priority associated with the at least one wafer based on the jeopardy count associated with the at least one wafer.
An apparatus, comprising:
- at least one processing tool for processing wafers;
- at least one metrology tool;
- and
- a controller configured to:
- determine a jeopardy count associated with the at least one processing tool;
- and
- provide at least one wafer to said at least one metrology tool based upon the jeopardy count, the at least one wafer having been processed by the at least one processing tool, wherein the controller is configured to determine a priority associated with the at least one wafer based on the jeopardy count associated with the at least one wafer.
4 more elements
Dependencies are inferred from the claim text.