SOI active layer with different surface orientation

A method of making a semiconductor device, comprising:

• providing a first wafer having a semiconductor layer of a first surface orientation:
• selectively etching the semiconductor layer to form semiconductor structures of the first surface orientation and receptor openings;
• providing semiconductor structures of a second surface orientation different from the first surface orientation;
• locating the semiconductor structures of the second surface orientation into the receptor openings;
• forming transistors of a first type in the semiconductor structures of the first surface orientation;
• and
• forming transistors of a second type different from the first type in the semiconductor structures of the second surface orientation
• wherein providing the semiconductor structures of the second surface orientation comprises:
• providing a plurality of unattached semiconductor structures having, the second surface orientation.

A method of making a semiconductor device, comprising:

• providing a wafer having a first plurality of semiconductor structures above an insulating layer, wherein the semiconductor structures have a first surface orientation;
• applying a second plurality of semiconductor structures having a second surface orientation different from the first surface orientation between the first plurality of semiconductor structures and over the insulating layer;
• and
• forming a substantially planar surface on the wafer, wherein the substantially planar surface comprises the first plurality of semiconductor structures, the second plurality of semiconductor structures, and isolation regions between the first plurality of semiconductor structures and the second plurality of semiconductor structures;
• forming transistors of a first type having their channel regions in the first plurality of semiconductor structures;
• and
• forming transistors of a second type different from the first type having their channel regions in the second plurality of semiconductor structures.