Real time monitoring system of semiconductor manufacturing information
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Pang Liu, Chen-Hsien Ho
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsChih-Pang Liu, Chen-Hsien Ho
Estimating the term…
The present disclosure provides a system for monitoring semiconductor manufacturing in real time which includes an icon module with a database for storing a plurality of icons to provide stored icons that use vector data to represent respective pieces of equipment employed in semiconductor manufacture, a layout module which includes a database for storing information on a layout of a semiconductor manufacturing facility to provide stored information on the layout, and a joiner module, which is receptive to the icon module and the layout module, for using vector data to merge stored icons received from the icon module with stored information on the layout received from the layout module to produce a merged graphical layout of the semiconductor manufacturing facility. Upon merging, the icons are accessible in the merged graphical display to display real time information relating to semiconductor manufacture.
A system for monitoring semiconductor manufacturing in real time comprising a user interface and a services system, the services system for providing real time information to the user interface, the user interface comprising:
A system for monitoring semiconductor manufacturing in real time comprising:
A method for monitoring semiconductor manufacturing in real time comprising:
Dependencies are inferred from the claim text.