Multi-function teach pendant for a semiconductor manufacturing environment

A method for configuring a hand-held device for interaction with multiple process tools in a semiconductor processing environment, the method comprising:

• defining, within the device, at least a first program for simulating a first device able to communicate with a first process tool and a second program for simulating a second device able to communicate with a second process tool;
• entering a first set of instructions into the device, wherein the first set of instructions enable the device to differentiate between the first and second process tools;
• entering a second set of instructions into the device, wherein the second set of instructions select either the first or second program;
• and
• entering a third set of instructions into the device, wherein the third set of instructions includes commands to send to the first or second tool, wherein the commands are sent to the first or second tool based on whether the first or second program was selected.

A system for programming multiple process tools in a semiconductor manufacturing environment, the system comprising:

• a network;
• first and second process tools accessible to the network;
• and
• a hand-held device configured to simulate a first program for communicating with the first process tool and a second program for communicating with the second process tool, the hand-held device including:
• an interface adapted for establishing a connection between the device and the first and second process tools;
• a processor operable to process executable instructions;
• an input device for receiving input instructions for programming the first and second process tools;
• and
• a memory containing the executable instructions accessible to the processor, wherein the executable instructions are divided into at least a first set of instructions for simulating the first program and a second set of instructions for simulating the second program, the instructions including:
• instructions for identifying whether the handheld device is to communicate with the first or second process tool;
• instructions for selecting the first or second set of instructions based on whether the handheld device is to communicate with the first or second process tool, respectively;
• and
• instructions for programming the first or second tool using the simulated first or second program, respectively.