Semiconductor device and method of manufacturing the same
AssigneeFujitsu Limited
InventorNaoya Sashida
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Abstract
There is provided a semiconductor device which comprises a first interlayer insulating film (first insulating film) formed over a silicon (semiconductor) substrate, a capacitor formed on the first interlayer insulating film and having a lower electrode, a dielectric film, and an upper electrode, a fourth interlayer insulating film (second insulating film) formed over the capacitor and the first interlayer insulating film, and a metal pattern formed on the fourth interlayer insulating film over the capacitor and its periphery to have a stress in an opposite direction to the fourth interlayer insulating film. As a result, characteristics of the capacitor covered with the interlayer insulating film can be improved.
Claims11
A manufacturing method of semiconductor device comprising:
- forming a first insulating film over a semiconductor substrate;
- forming capacitors, each having a lower electrode, a dielectric film, and an upper electrode, on the first insulating film in a cell region;
- forming a second insulating film over the capacitors and the first insulating film;
- forming a metal film on the second insulating film;
- forming a metal pattern, which covers the cell region, by patterning the metal film;
- and
- heating the metal film at a melting point or less of the metal film before or after the formation of the metal pattern, to change a stress of the metal film.
Dependencies are inferred from the claim text.