Holding device for disk-shaped objects
AssigneeNanophotonics AG
InventorsSönke Siebert, Michael Schweiger, Andreas Lang
Life of this patent
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Abstract
Semiconductor technology requires the use of object holders, which are capable of holding wafers securely, also during rotation. In order to save time and expense, such holders should be suitable for integration directly into a processing facility, wherever possible. According to the invention it is proposed to provide centrally mounted holders which comprise support surfaces for the wafer and pivotable gripper fingers, in which the gripper fingers are pretensioned by means of at least one pretension element in the holding position and are actuated through one opening mechanism, in which at least one opening mechanism and at least one pretension element are integrated in the central clamping arm fixture and/or in the clamping arms.
Claims19
A holding device for disk-shaped objects, comprising:
- a central clamping arm fixture, and at least two centrally mounted and outwardly extending clamping arms, comprising support surfaces adapted for the object and pivotable gripper fingers, in which the gripper fingers are pivotable on a pivot axis from a holding position into an opening position and vice versa, and are pretensioned by means of at least one pretension element and are actuated by means of at least one opening mechanism, wherein the gripper fingers are pivotally mounted in such a manner that they grasp the object only perpendicular in relation to a disk surface in the holding position, wherein an edge of the object is clamped between the gripper fingers and the support surface, and wherein said at least one opening mechanism and at least one pretension element are integrated in the central clamping arm fixture or the clamping arms, or a combination thereof.
Dependencies are inferred from the claim text.