Automatic recipe validation
AssigneeKLA-Tencor Technologies Corporation
InventorsItai Bransky, Shachor Omer, Arkady Simkin, Igor Baskin
Life of this patent
Estimating the term…
Abstract
Automated comparison of tool recipes is described. A target recipe is digitally translated from a tool language to a standard language format to produce a translated recipe. The translated recipe is digitally compared to a source recipe that is also in the standard language format.
Claims27
In a system having one or more tools, a method for recipe comparison, the method comprising:
- digitally translating a target recipe from a tool language to a standard language format to produce a translated recipe;
- digitally comparing one or more portions of the translated recipe to a source recipe, wherein the source recipe is in the standard language format, and
- reporting a result of comparing the one or more portions of the translated recipe to the source recipe.
A recipe database management server, comprising
- a processor;
- a memory coupled to the processor;
- a database stored within the memory, the database containing one or more standard tool recipes;
- and a set of coded instructions configured to execute on the processor a method for recipe comparison in a system having one or more tools coupled to the recipe database management server, the method comprising:
- translating a tool recipe stored in a processing tool from a tool language to a standard language format to produce a translated tool recipe with a translator running on the database management server;
- comparing the translated tool recipe to a standard recipe stored on the database management server in the standard language format.
A processor readable medium having embodied therein a set of processor readable instructions, the processor readable instructions, the instructions being configured to implement a method for recipe comparison in a system having one or more tools coupled to a recipe database management server, the method comprising:
- translating a tool recipe stored a processing tool from a tool language to a standard language format to produce a translated tool recipe with a translator running on the database management server;
- comparing the translated tool recipe to a standard recipe stored on the database management server in the standard language format.
Dependencies are inferred from the claim text.