Dielectric-coated electrode, plasma discharge treatment apparatus and method for forming thin film
AssigneeKonica Corporation
InventorShunichi Iwamaru
Life of this patent
Estimating the term…
Abstract
A dielectric-coated electrode having a conductive base material coated with a dielectric on a surface thereof, the dielectric including a first metal atom and a second metal atom. As for an ionic strength of the first metal atom and an ionic strength of the second metal atom according to a dynamic SIMS measurement, the ionic strength of the second metal atom is larger than the ionic strength of the first metal atom from the most surface of the dielectric toward a predetermined depth of the dielectric, and the ionic strength of the first metal atom is larger than the ionic strength of the second metal atom from the predetermined depth toward the surface of the conductive base material.
Claims34
A dielectric-coated electrode comprising:
- a conductive base material coated with a dielectric on a surface thereof,
- the dielectric comprising:
- a first metal atom;
- and
- a second metal atom,
- wherein as for an ionic strength of the first metal atom and an ionic strength of the second metal atom according to a dynamic SIMS measurement, the ionic strength of the second metal atom is larger than the ionic strength of the first metal atom from the most surface of the dielectric toward a predetermined depth of the dielectric, and the ionic strength of the first metal atom is larger than the ionic strength of the second metal atom from the predetermined depth of the dielectric toward the surface of the conductive base material.
Dependencies are inferred from the claim text.