Substrate processing system managing apparatus information of substrate processing apparatus

A substrate processing apparatus connected to a prescribed computer through a network, comprising:

• a) a first storage element storing control information for controlling operation of said substrate processing apparatus, said control information including a control program for controlling said substrate processing apparatus and set information defining said operation of said substrate processing apparatus,
• wherein said set information includes:
• basic information for defining said operation of said substrate processing apparatus, and
• correction information added to said basic information for optimizing control of said substrate processing apparatus;
• b) a backup information acquisition element acquiring backup information backing up said control information stored in said first storage element, said control information including said control program for controlling said substrate processing apparatus and said set information defining said operation of said substrate processing apparatus;
• c) a transmission element transmitting said backup information acquired by said backup information acquisition element to said computer;
• and
• d) a restore processing element fetching said backup information and upon receiving said backup information from said computer, storing said backup information as restored control information in said first storage element, said restored control information including said control program for controlling said substrate processing apparatus and said set information defining said operation of said substrate processing apparatus.

A substrate processing apparatus management method for use with a management system having a substrate processing apparatus and a support center including an information storage computer that is operable to collecting information about said substrate processing apparatus, said support center and said substrate processing apparatus being communicatively connected with each other through a communication network, the method comprising steps of:

• a) storing in a first storage element comprised in said substrate processing apparatus, control information for controlling operation of said substrate processing apparatus, said control information including a control program for controlling said substrate processing apparatus and set information defining said operation of said substrate processing apparatus,
• wherein said set information includes:
• basic information for defining said operation of said substrate processing apparatus, and
• correction information added to said basic information for optimizing control of said substrate processing apparatus;
• b) acquiring as backup information backing up said control information stored in said first storage element, said control information including said control program for controlling operation of said substrate processing apparatus and said set information defining said operation of said substrate processing apparatus;
• c) storing said backup information acquired in step b) in a second storage element comprised in said information storage computer;
• and,
• d) performing restore processing by fetching said backup information stored in said second storage element in step (c) and storing said backup information as restored control information in said first storage element, said restored control information including said control program for controlling said substrate processing apparatus and said set information defining said operation of said substrate processing apparatus.

A computer-readable recording medium comprising computer executable instructions for a computer included in a substrate processing apparatus, said substrate processing apparatus being connected with an outer computer through a network, wherein execution of said program by said computer in said substrate processing apparatus enables said substrate processing apparatus to execute a process comprising:

• a) acquiring backup information backing up control information stored in a first storage element comprised in said substrate processing apparatus, for controlling operation of said substrate processing apparatus, said control information including a control program for controlling said substrate processing apparatus and set information defining said operation of said substrate processing apparatus,
• wherein said set information includes:
• basic information for defining said operation of said substrate processing apparatus, and
• correction information added to said basic information for optimizing control of said substrate processing apparatus;
• b) transmitting said backup information acquired in step a) to said outer computer for storing said backup information in a second storage element comprised in said outer computer;
• and
• c) performing restore processing by fetching said backup information transmitted and stored in said second storage element of said outer computer in step (b) and upon receiving said backup information from said outer computer, storing said backup information as restored control information in said first storage element, said restored control information including said control program for controlling said substrate processing apparatus and said set information defining said operation of said substrate processing apparatus.