Micro-electro-mechanical switch and a method of using and making thereof
AssigneeRochester Institute of Technology
InventorMichael D. Potter
Life of this patent
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Abstract
A micro-electro-mechanical switch includes at least one portion of a conductive line in the chamber, a beam with imbedded charge, and control electrodes. The beam has a conductive section which is positioned in substantial alignment with the at least one portion of the conductive line. The conductive section of the beam has an open position spaced away from the at least one portion of the conductive line and a closed position on the at least one portion of the conductive line. Each of the control electrodes is spaced away from an opposing side of the beam to control movement of the beam.
Claims22
A switch comprising:
- at least one portion of a conductive line;
- a beam comprising two or more insulating layers, wherein one of the two or more insulating layers is located directly on the other one of the two or more insulating layers and the layers hold a fixed, imbedded charge, the beam having a conductive section which is positioned in substantial alignment with the at least one portion of the conductive line, the conductive section of the beam having an open position spaced away from the at least one portion of the conductive line and a closed position on the at least one portion of the conductive line;
- an
- control electrodes, each of the control electrodes are spaced away from an opposing side of the beam to control movement of the beam.
A method of using a switch, the method comprising:
- applying a potential with a first polarity to control electrodes which are spaced away from opposing side of a beam to control movement of the beam, wherein the beam comprises two or more insulating layers, wherein one of the two or more insulating layers is located directly on the other one of the two or more insulating layers and the layers hold a fixed, imbedded charge and the beam has a conductive section which is positioned in substantial alignment with a conductor;
- and
- moving the conductive section on the beam to one of an open position spaced away from the conductor or a closed position on the conductor in response to the first polarity of the applied potential.
Dependencies are inferred from the claim text.