Apparatus for forming a striation reduced chemical mechanical polishing pad
AssigneeRohm and Haas Electronic Materials CMP Holdings, Inc.
InventorsDavid M. Kolesar, Robert L. Post, Alan H. Saikin, Aaron Sarafinas
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Abstract
The present invention provides an apparatus for forming a chemical mechanical polishing pad, comprising a tank with polymeric materials, a storage silo with microspheres and a curative storage tank with curing agents. The apparatus further provides a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres and a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached. The apparatus further provides a premix run tank for storing the pre-mixture, a mixer for forming a mixture of the pre-mixture and the curing agents and a mold for molding the mixture.
Claims10
An apparatus for forming a chemical mechanical polishing pad, comprising:
- a tank with polymeric materials;
- a storage silo with microspheres;
- a curative storage tank with curing agents;
- a premix prep tank for forming a pre-mixture of the polymeric materials and the microspheres;
- a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached;
- a premix run tank for storing the pre-mixture;
- a mixer for forming a mixture of the pre-mixture and the curing agents;
- and
- a mold for molding the mixture.
An apparatus for forming a chemical mechanical polishing pad, comprising:
- a first prepolymer storage tank with first polymeric materials;
- a storage silo with microspheres;
- a curative storage tank with curing agents;
- a premix prep tank for forming a pre-mixture of the first polymeric materials and the microspheres;
- a recirculation loop in the premix prep tank for recirculating the pre-mixture until a desired bulk density is reached;
- a premix run tank for storing the pre-mixture;
- a mixer for forming a mixture of the pre-mixture and the curing agents;
- at least a second prepolymer storage tank with second polymeric materials for providing the second polymeric materials to the mixture until a desired bulk density is reached;
- and
- a mold for molding the mixture.
An apparatus for forming a chemical mechanical polishing pad, comprising:
- a prepolymer storage tank with polymeric materials;
- a storage silo with microspheres;
- a curative storage tank with curing agents;
- a premix run/prep tank for forming a pre-mixture of the polymeric materials and the microspheres;
- a recirculation loop in the premix run/prep tank for recirculating the pre-mixture until a desired bulk density is reached;
- a mixer for forming a mixture of the pre-mixture and the curing agents;
- and
- a mold for molding the mixture.
Dependencies are inferred from the claim text.