Method for fabricating an acoustical resonator on a substrate
AssigneeAvago Technologies Wireless IP (Singapore) Pte. Ltd.
InventorsRichard C. Ruby, John D. Larson, Paul D. Bradley
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Abstract
Method for fabricating an acoustical resonator on a substrate having a top surface. First, a depression in said top surface is generated. Next, the depression is filled with a sacrificial material. The filled depression has an upper surface level with said top surface of said substrate. Next, a first electrode is deposited on said upper surface. Then, a layer of piezoelectric material is deposited on said first electrode. A second electrode is deposited on the layer of piezoelectric material using a mass load lift-off process.
Claims11
A method for fabricating an acoustical resonator on a substrate having a top surface, said method comprising steps of:
- a) generating a depression in said top surface;
- b) filling said depression with a sacrificial material, said filled depression having an upper surface level with said top surface of said substrate;
- c) depositing a first electrode on said upper surface;
- d) depositing a layer of piezoelectric material on said first electrode;
- and
- e) depositing a second electrode on said layer of piezoelectric material using a mass load lift-off process;
- wherein the mass load lift-off process utilizes a mass load pattern and a mass load.
A method for fabricating an acoustical resonator on a substrate having a top surface, said method comprising steps of:
- forming a swimming pool in the substrate;
- forming a bottom electrode;
- forming a piezoelectric layer;
- forming a top electrode by
- depositing a conductive material;
- applying a mass load pattern;
- depositing a mass load;
- lifting off the mass load;
- applying a patterned mask;
- and
- etching conductive material in accordance with the patterned mask to form the top electrode.
A method for fabricating a shunt acoustical resonator and a series acoustical resonator on a substrate having a top surface, said method comprising:
- forming the shunt acoustical resonator;
- forming the series acoustical resonator;
- utilizing mass loading to lower the frequency of the shunt resonator relative to the series resonator.
Dependencies are inferred from the claim text.