Integrable acoustic resonator and method for integrating such resonator
AssigneeSTMicroelectronics S.r.l.
InventorsJean-François Carpentier, Cyrille Tilhac, Didier Belot
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Abstract
An acoustic resonator circuit to be integrated into a semiconductor product including: a resonator comprising first and second resonant frequencies; an inductive resistor tuned to said second resonant frequency so as to cancel the latter and to allow tuning of the resonator to said first resonant frequency; an tunable capacitive tuning element allowing to tune the resonator to said first frequency. A method is also provided for manufacturing an integrated circuit comprising an acoustic component allowing sufficient control of resonator characteristics.
Claims24
An acoustic resonator circuit to be integrated into a semiconductor product including a resonator having a first and a second resonant frequency, the circuit comprising:
- an inductive resistor to cancel said second resonant frequency;
- and
- a capacitive tuning element to tune said resonator to said first frequency;
- wherein
- the tuning of said resonator to said first frequency being reinforced by an effect of said inductive resistor, wherein said resonator is a bulk acoustic wave (BAW)-type resonator that is integrated in said semiconductor product.
A method for manufacturing an integrated circuit including an acoustic component based on an acoustic resonator having first and second resonant frequencies, said method comprising:
- integrating an acoustic resonator into a semiconductor product substrate, said resonator being a bulk acoustic wave (BAW)-type resonator;
- inserting an inductive resistor cooperating with said resonator so as to cancel said second resonant frequency;
- inserting a tunable capacitive tuning element in order to compensate for a lack of accuracy in said first resonant frequency of said resonator;
- measuring characteristics of said resonator using a reference element;
- and
- in response to said measurement, controlling said capacitive tuning element in order to set a resulting resonance of said acoustic component to a value complying with manufacture specifications for said integrated circuit.
An apparatus including a resonator having first and second resonant frequencies, the apparatus comprising:
- an inductive element coupled to the resonator to cancel the second resonant frequency;
- and
- a capacitive element coupled to the resonator to tune the resonator to the first resonant frequency, the inductive element being coupled to strengthen a tuning effect by the capacitive element to the first resonant frequency,
- wherein said resonator is a bulk acoustic wave (BAW)-type resonator that is integrated in a semiconductor product.
A method usable with a resonator having first and second resonant frequencies, the method comprising:
- using an inductive element to cancel the second resonant frequency;
- using a capacitive element to tune the resonator to the first resonant frequency;
- and
- using the inductive element to strengthen a tuning effect by the capacitive element to the first resonant frequency,
- wherein said resonator is a bulk acoustic wave (BAW)-type resonator that is integrated in a semiconductor product.
A system including a resonator having first and second resonant frequencies, the system comprising:
- means for using an inductive element to cancel the second resonant frequency;
- means for using a capacitive element to tune the resonator to the first resonant frequency;
- and
- means for using the inductive element to strengthen a tuning effect by the capacitive element to the first resonant frequency,
- wherein said resonator is a bulk acoustic wave (BAW)-type resonator that is integrated in a semiconductor product.
Dependencies are inferred from the claim text.