Detector for detecting particle beams and method for the production thereof
AssigneeGesellschaft fuer Schwerionenforschung mbH
InventorsElèni Berdermann, Wim De Boer
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Abstract
The invention relates to a detector, and to a method for the production thereof, for detecting a high-energy and high-intensity particle beam (2), which comprises a crystalline semi-conductor plate (3) having a metal coating (4) and which is arranged on a substrate (5), the semi-conductor plate (3) being a diamond plate (6), which is coated on both faces with metal structures (7, 8). The metal structures (7, 8) comprise aluminium and/or an aluminium alloy and form electrodes, which are arranged to be connected to various electrical potentials by way of conductor tracks (10) on the substrate (5), the substrate (5) being a ceramic plate (11) having a central orifice (24), which is covered by the diamond plate (6).
Claims27
Detector for detecting a high-intensity and high-energy particle beam (2), which comprises a crystalline semi-conductor plate (3) having a metal coating (4) and which is arranged on a substrate (5), wherein
- the semi-conductor plate (3) is a diamond plate (6), which is coated on both faces with metal structures (7, 8), the metal structures (7, 8) comprising aluminium and/or an aluminium alloy and the metal structures (7, 8) comprising electrodes (9), which are arranged to be connected to various electrical potentials by way of conductor tracks (10) on the substrate (5), and the substrate (5) comprising a ceramic plate (11) having a central orifice (24), which is covered by the diamond plate (6).
Method for the production of a detector (1) for detecting high-intensity and high-energy particle beams, which detector comprises a crystalline semi-conductor plate (3) having a metal coating (4) and which detector is arranged on a substrate (5), the method comprising the following method steps:
- provision of a substrate plate (27),
- chemical gas phase deposition, on the substrate plate (27), of a diamond layer (28) of carbon,
- removal of the substrate plate (27) from the diamond layer (28) to form a self-supporting diamond plate (6),
- coating of the upper face and reverse face of the diamond plate (6) with metal structures (7, 8),
- production of a ceramic plate (11) having a central orifice (24) and interwiring lines or conductor tracks having contact connection surfaces (22) and/or passive components,
- mounting of the diamond plate (6), metallised on both sides, on the ceramic plate (11), the central orifice (24) being covered,
- connection of the metal structures (7, 8) of the diamond plate (6) to the conductor tracks (10) or metal layers (17) on the ceramic plate (11),
- fixing the detector components on a carrier frame (23).
Dependencies are inferred from the claim text.