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US 7,273,995 B1Granted
Plasma generator
AssigneeImperial College of Science, Technology and Medicine
InventorsAndreas Manz, Jan Cornelis Titus Eijkel, Herbert Stoeri
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Abstract
A microfabricated plasma generator and a method of generating a plasma, the plasma generator comprising: a substrate chip; a chamber defined by the substrate chip, the chamber including an inlet port through which analyte is in use delivered, an outlet port and a plasma-generation region in which a plasma is in use generated; and first and second electrodes across which a voltage is in use applied to generate a plasma in the plasma-generation region.
Claims64
A microfabricated plasma generator, comprising:
- a substrate chip;
- a chamber defined by the substrate chip, the chamber including an inlet port through which analyte is in use delivered, an outlet port and a plasma-generation region in which a plasma is in use generated;
- and
- first and second electrodes across which a voltage is in use applied to generate a plasma therebetween in the plasma-generation region,
- wherein the plasma is a particular ionized gas containing charged particles of both polarities.
2 more elements
A method of generating a plasma, comprising the steps of:
- providing a plasma generator comprising a substrate chip defining a chamber including a plasma-generation region, and first and second electrodes across which a voltage is applied to generate a plasma in the plasma-generation region;
- delivering analyte and operating medium to the chamber;
- and
- applying a voltage across the first and second electrodes to generate a plasma therebetween in the plasma-generation region,
- wherein the plasma is a particular ionized gas containing charged particles of both polarities.
2 more elements
Dependencies are inferred from the claim text.