Conductive diamond electrode and process for producing the same
AssigneePermelec Electrode Ltd.
InventorsTomoyasu Shibata, Masashi Hosonuma, Tsuneto Furuta
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Abstract
A conductive diamond electrode including an electrode substrate comprising a material selected from the group consisting of a valve metal and an alloy based on the valve metal, at least a surface of the metal or alloy having been subjected to plasticization processing, or heat treatment in vacuum or inert atmosphere; and a conductive diamond film formed on the plasticization processed surface of the electrode substrate. When the electrode substrate is subjected to plasticization processing and heat treatment, peeling resistance of the conductive diamond film is improved, thereby an electrode life is prolonged.
Claims7
A conductive diamond electrode comprising:
- an electrode substrate comprising a material selected from a valve metal selected from the group consisting of niobium, tantalum, and zirconium, and an alloy based on the valve metal, at least a surface of the metal or alloy having been subjected to plasticization processing and heat treatment in vacuum or inert atmosphere, and
- a conductive diamond film formed on the plasticization processed surface of the electrode substrate.
A process for producing the conductive diamond electrode, which comprises:
- subjecting at least a surface of an electrode substrate to plasticization processing, the electrode substrate comprising a material selected from a valve metal selected from the group consisting of niobium, tantalum, and zirconium, and an alloy based on the valve metal;
- subjecting the electrode substrate to heat treatment in vacuum or inert atmosphere;
- and
- forming a conductive diamond film on the surface of the heat-treated electrode substrate.
Dependencies are inferred from the claim text.