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US 7,271,918 B2Granted
Profiling complex surface structures using scanning interferometry
AssigneeZygo Corporation
InventorsPeter J. De Groot, Robert Stoner, Xavier Colonna De Lega
Life of this patent
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Abstract
A method including comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object. The information corresponding to the multiple models may include information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.
Claims83
A method comprising:
- comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object;
- and
- outputting information about the test object based on the comparison,
- wherein the multiple models are parametrized by a series of characteristics for the test object;
- wherein the information corresponding to the multiple models comprises information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to each of the models of the test object.
2 more elements
Apparatus comprising:
- a computer readable medium having a program that causes a processor in a computer to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object and output information about the test object based on the comparison, wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the information corresponding to the multiple models comprises information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to one of the models of the test object.
Apparatus comprising:
- a scanning interferometry system configured to produce a scanning interferometry signal;
- and
- an electronic processor coupled to the scanning interferometry system to receive the scanning interferometry signal and programmed to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the information corresponding to the multiple models comprises information about at least one amplitude component of a transform of a scanning interferometry signal corresponding to one of the models of the test object.
1 more element
A method comprising:
- comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, and
- outputting information about the test object based on the comparison,
- wherein the multiple models correspond to a fixed surface height for the test object at the first location and are parametrized by a series of characteristics for the test object different from the fixed surface height.
Apparatus comprising:
- a computer readable medium having a program that causes a processor in a computer to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object and output information about the test object based on the comparison,
- wherein the multiple models correspond to a fixed surface height for the test object at the first location and are parametrized by a series of characteristics for the test object different from the fixed surface height.
Apparatus comprising:
- a scanning interferometry system configured to produce a scanning interferometry signal;
- and
- an electronic processor coupled to the scanning interferometry system to receive the scanning interferometry signal and programmed to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object,
- wherein the multiple models correspond to a fixed surface height for the test object at the first location and are parametrized by a series of characteristics for the test object different from the fixed surface height.
1 more element
A method comprising:
- comparing information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object;
- and
- outputting information about the test objected based on the comparison,
- wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the comparing comprises accounting for systematic contributions to the scanning interferometry signal arising from a scanning interferometry system used to produce the scanning interferometry signal.
2 more elements
Apparatus comprising:
- a computer readable medium having a program that causes a processor in a computer to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object and output information about the test object based on the comparison,
- wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the program further causes the processor to account for systematic contributions to the scanning interferometry signal arising from a scanning interferometry system used to produce the scanning interferometry signal during the comparison.
Apparatus comprising:
- a scanning interferometry system configured to produce a scanning interferometry signal;
- and
- an electronic processor coupled to the scanning interferometry system to receive the scanning interferometry signal and programmed to compare information derivable from a scanning interferometry signal for a first surface location of a test object to information corresponding to multiple models of the test object, wherein the multiple models are parametrized by a series of characteristics for the test object,
- wherein the electronic processor is further programmed to account for systematic contributions to the scanning interferometry signal arising from a scanning interferometry system used to produce the scanning interferometry signal during the comparison.
1 more element
Dependencies are inferred from the claim text.