Method to improve ability to perform CMP-assisted liftoff for trackwidth definition

A method for fabricating a read head for a hard disk drive having a read head sensor of CIP configuration and a hard bias/lead layer, said method comprising:

• A) forming sensor layer stack a sensor material region;
• B) forming fast-milling dielectric stacks formed from material chosen from a group consisting of Ta2O5, SiO2, Si3N4, AlN variable compositions of Al—Si—O—N, HfO2, ZrO2, and Hf(1-x)SixO2 in first and second fast-milling dielectric material regions adjacent to said sensor material region;
• C) depositing a layer of masking material said sensor layer stack and said fast-milling dielectric stacks;
• D) shaping said sensor layer stack to desired track width and shaping said fast-milling dielectric stacks to have a reduced residual step height;
• E) depositing said hard bias/lead material on said region of sensor material and said first and second regions of fast-milling dielectric material to form first and second leads and a cap on each of these regions;
• F) removing said cap of hard bias/lead material from each of these regions.

A magnetic head having a read head for a hard disk drive, comprising:

• a sensor stack which has been shaped into a sensor of CIP configuration;
• stacks of fast-milling dielectric material formed from material chosen from a group consisting of Ta2O5, SiO2, Si3N4, AlN, variable compositions of Al—Si—O—N, HfO2, ZrO2, and Hf(1-x)SixO2, adjacent to said sensor stack, said stacks of fast-milling dielectric material being shaped along with said sensor stack so that a residual step of step height of 50 Å or less remains in first and second fast-milling dielectric material regions adjacent to said sensor material region;
• and
• a hard bias/leads layer which has been deposited on said sensor stack and fast-milling dielectric stacks, such that separate first and second leads and a cap are formed due to the reduced residual step height, and said caps are removed by CMP processes, leaving unconnected first and second leads.