Bidirectional singulation saw and method
OwnerDavid Walter Smith, William Albert Brehm +1inventors
InventorsDavid Walter Smith, William Albert Brehm, Steven John DiPrinzio
Life of this patent
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OwnerDavid Walter Smith, William Albert Brehm +1inventors
InventorsDavid Walter Smith, William Albert Brehm, Steven John DiPrinzio
Estimating the term…
A singulation saw for sawing either substrate or wafers includes a pair of counter-rotating saw blades mounted for independent movement in a vertical direction for alternatively engaging with a substrate to be singulated. The singulation saw further includes a transport system including a pair of substrate carriers reciprocates the substrates. While the first substrate is being cut, the second substrate or other substrate carrier sequentially unloads a cut substrate, loads a new uncut substrate and then moves the uncut substrate to a vision system for determining the position of the substrate relative to the second carrier and then positions the second carrier and its substrate in a standby position ready to be cut by the pair of saw blades that are cutting the first substrate. As the first cut substrate is moved to an unload position, the new uncut substrate is moved into a cutting position.
A cutting system for use in singulation of substrates and dicing of wafers, comprising:
Dependencies are inferred from the claim text.