Resettable latching MEMS shock sensor apparatus and method

A micro-electromechanical shock sensor device, comprising:

• a first moveable proof mass comprising
• a first mechanical latch and
• a first electrical contact;
• and
• a pawl comprising a second mechanical latch, the second mechanical latch disposed at a latching distance from the first mechanical latch, the latching distance corresponding to a latching threshold shock level;
• and
• wherein the first mechanical latch moves toward the second mechanical latch when the proof mass experiences a shock level in the direction of the latching threshold shock level;
• and
• wherein the first mechanical latch engages with the second mechanical latch when the shock level reaches the latching threshold shock level;
• and
• a second moveable proof mass comprising a second electrical contact positioned so as to make an electrical contact with the first electrical contact after the first and second mechanical latches have latched.

A micro-electromechanical shock sensor device, comprising:

• a moveable proof mass comprising
• a plurality of latches disposed at a plurality of latching distances from at least one holding latch, the plurality of latching distances corresponding to a plurality of latching shock levels, and
• a first electrical contact;
• and
• at least one pawl comprising the at least one holding latch;
• and
• a plurality of second electrical contacts disposed at a plurality of electrical contact distances from the first electrical contact, the plurality of electrical contact distances corresponding to a plurality of electrical contact shock levels;
• wherein the plurality of latches moves toward the at least one holding latch and the first electrical contact moves toward the plurality of electrical contacts when the proof mass experiences a shock level in the direction of the plurality of contact shock levels;
• and
• wherein at least one of the plurality of latches engages with at least one holding latch when the shock level reaches any of the plurality of latching shock levels;
• and
• wherein the first electrical contact contacts with at least one of the plurality of electrical contacts when the shock level reaches the plurality of electrical contact shock levels.

A method for sensing shock using a micro-electromechanical device, comprising the steps of:

• fabricating a micro-electromechanical shock sensor device, comprising:
• a moveable proof mass comprising
• a first mechanical latch and
• a first electrical contact;
• and
• a pawl comprising a second mechanical latch, the second mechanical latch disposed at a latching distance from the first mechanical latch, the latching distance corresponding to a latching threshold shock level;
• and
• a second electrical contact disposed at an electrical contact distance from the first electrical contact, the electrical contact distance corresponding to an electrical contact threshold shock level;
• wherein the first mechanical latch moves toward the second mechanical latch and the first electrical contact moves toward the second electrical contact when the proof mass experiences a shock level in the direction of the latching threshold shock level;
• and
• wherein the first mechanical latch engages with the second mechanical latch when the shock level reaches the latching threshold shock level;
• and
• wherein the first electrical contact contacts with the second electrical contact when the shock level reaches the electrical contact threshold shock level;
• and
• installing the sensor in a location in which shock is desired to be monitored.