Method for the hermetic encapsulation of a component
AssigneeEpcos AG
InventorsAlois Stelzl, Hans Krueger, Ernst Christl
Life of this patent
Estimating the term…
Abstract
For hermetic encapsulation of a component, which includes a chip with component structures applied on a substrate in a flip-chip construction, a material is applied onto the lower edge of the chip and regions of the substrate abutting the chip, and then a first continuous metal layer is applied on the back side of the chip and on the material, as well as on edge regions of the substrate abutting the material. For hermetic encapsulation, a second sealing metal layer is subsequently applied by a solvent-free process at least on those regions of the first metal layer that cover the material.
Claims16
A method for production of an encapsulated encapsulation for an electrical component comprising the steps of:
- attaching a component with metallizations respectively fashioned on each of a plurality of chips a chip to a substrate in a spaced manner that has electrical connection areas so that the surface of the plurality of chips bearing component structures faces the substrate and bump connections electrically connect the metallization of the substrate with the connection areas provided on each of the plurality of chips provide a slight distance from the substrate;
- applying a material to cover at least the lower edges of the plurality of chips and a region of the substrate abutting the edges of the plurality of chips;
- applying a first, continuous metal layer on the back side of the plurality of chips, on the material and on edge regions of the substrate abutting the material;
- applying a second, hermetically sealing metal layer by a solvent-free process at least on the regions of the first metal layer that cover the material;
- subsequent to applying the second metal layer on the chips, isolating the individual components by sectioning between the chips outside of the edge regions of each component;
- wherein the step of applying the first metal layer comprises applying a titanium layer and then a copper layer on each of the components, the step of applying the second metal layer comprises applying a metal layer selected from the group consisting of tin, tin-silver, tin-sliver copper alloys and mixtures of said metals on the first metal layer, said step of sectioning including removing the second metal layer in the regions to be sectioned to expose the first metal layer, chemically etching the exposed regions of the first metal layer to remove the exposed portions and subsequently sectioning by sawing the components apart.
Dependencies are inferred from the claim text.