Layout structure of semiconductor integrated circuit and method for forming the same

A layout structure of a semiconductor integrated circuit formed on a semiconductor substrate by a photolithographic process using an exposing light having a wavelength of λ, the layout structure comprising:

• an internal circuit region including a cell array formed by arranging a plurality of unit cells in rows and columns, an outer perimeter of the internal circuit region having an internal side;
• a peripheral circuit region formed by arranging a plurality of peripheral circuit cells along the internal side, each of the plurality of peripheral circuit cells being different from any of the plurality of unit cells and including a peripheral circuit pattern in at least one layer, an outer perimeter of the peripheral circuit region having a peripheral side that does not face the internal side;
• and
• a proximity dummy region formed by arranging a proximity dummy cell along the peripheral side, the proximity dummy cell having a proximity dummy pattern, which does not contribute to a logical function of the semiconductor integrated circuit, in the at least one layer, wherein:
• the peripheral circuit patterns in the peripheral circuit cells arranged along the internal side and the proximity dummy pattern in the proximity dummy cell arranged along the peripheral side form, in the at least one layer, a continuous line-and-space repetition structure including lines and spaces between the lines;
• and
• the line-and-space repetition structure includes one of the lines, in each of the peripheral circuit region and the proximity dummy region, within 4×λ from a first one of the lines in the peripheral circuit region closest to the peripheral side.

A method of forming;

• on a computer system, a layout structure of a semiconductor integrated circuit to be formed on a semiconductor substrate by a photolithographic process using an exposing light with a wavelength of λ, the method comprising:
• registering in a library, unit cell data, peripheral circuit cell data different from the unit cell data and including data regarding a peripheral circuit pattern in at least one layer of a peripheral circuit cell, and proximity dummy cell including data regarding a proximity dummy pattern, which does not contribute to a logical function of the semiconductor integrated circuit, in the at least one layer;
• forming an internal circuit region by arranging a plurality of unit cells in rows and columns based on the unit cell data, an outer perimeter of the internal circuit region having an internal side;
• forming a peripheral circuit region by arranging a plurality of peripheral circuit cells along the internal side based on the neripheral circuit cell data, an outer perimeter of the peripheral circuit region having a peripheral side that does not face the internal side;
• and
• forming a proximity dummy region by arranging a plurality of proximity dummy cells along the peripheral side based on the proximity circuit cell data, such that the proximity dummy patterns in the plurality of proximity dummy cells arranged along the peripheral side form, in the at least one layer, a line-and-space repetition structure extending along the peripheral side and including two or more pairs of lines and spaces between the lines in every 8×λ at any position within the proximity dummy region.

A method of forming, on a computer system, a layout structure of a semiconductor integrated circuit to be formed on a semiconductor substrate by a photolithographic process using an exposing light having a wavelength of λ, the method comprising:

• registering, in a library, unit cell data, peripheral circuit cell data different from the unit cell data and including data regarding a peripheral circuit pattern in at least one layer of a peripheral circuit cell, and proximity dummy cell data including data regarding a proximity dummy pattern, which does not contribute to a logical function of the semiconductor integrated circuit, in the at least one layer;
• forming an internal circuit region by arranging a plurality unit cells in rows and columns based on the unit cell data, an outer perimeter of the internal circuit region having an internal side;
• forming a peripheral circuit region by arranging a plurality of peripheral circuit cells along the internal side based on the peripheral circuit cell data, an outer perimeter of the peripheral circuit region having a peripheral side that does not face the internal side;
• and
• forming a proximity dummy region by arranging a proximity dummy cell along the peripheral side based on the proximity dummy cell data, such that:
• the peripheral circuit patterns in the peripheral circuit cells arranged along the internal side and the proximity dummy pattern in the proximity dummy cell arranged along the peripheral side form, in the at least one layer, a continuous line-and-space repetition structure including lines and spaces between the lines;
• and
• the line-and-space repetition structure includes one of the lines, in each of the peripheral circuit region and the proximity dummy region, within 4×λ from a first one of the lines in the peripheral circuit region closest to the peripheral side.

A method of forming, on a computer system, a layout structure of a semiconductor integrated circuit to be formed on a semiconductor substrate by a photolithographic process using an exposing light having a wavelength of λ, the method comprising:

• registering unit cell data and combined peripheral circuit cell data in a library;
• the combined peripheral circuit cell data including data regarding a peripheral circuit pattern, in at least one layer of a peripheral circuit cell, adjacent to a first side of a frame of a combined peripheral circuit cell, and data regarding a plurality of proximity dummy patterns, which do not contribute to a logical function of the semiconductor integrated circuit, in the at least one layer, adjacent to a second side of the frame opposite to the first side;
• arranging a plurality of unit cells in rows and columns to form an internal circuit region based on the unit cell data, an outer perimeter of the internal circuit region having an internal side;
• and
• arranging a plurality of combined peripheral circuit cells along the internal side with the first sides of their frames facing the internal side based on the combined peripheral circuit cell data, such that:
• the peripheral circuit patterns in the plurality of combined peripheral circuit cells form a peripheral circuit region;
• and
• the plurality of proximity dummy patterns in the plurality of combined peripheral circuit cells form a proximity dummy region having, in the at least one layer, a line-and-space repetition structure extending in a direction parallel to the internal side and including two or more pairs of lines and spaces between the lines in every 8×λ at any position within the proximity dummy region.

A photomask comprising a mask pattern for forming one of a plurality of layers in a layout structure of a semiconductor integrated circuit by producing a reduced image of the mask pattern on a semiconductor substrate using an exposing light having a wavelength of λ, the layout structure comprising:

• an internal circuit region including a cell array formed by arranging a plurality of unit cells in rows and columns, an outer perimeter of the internal circuit region having an internal side;
• a peripheral circuit region formed by arranging a plurality of peripheral circuit cells along the internal side, each of the plurality of peripheral circuit cells being different from any of the plurality of unit cells and including a peripheral circuit pattern in the one of the plurality of layers, an outer perimeter of the peripheral circuit region having a peripheral side that does not face the internal side;
• and
• a proximity dummy region formed by arranging a plurality of proximity dummy cells along the peripheral side, each of the plurality of proximity dummy cells having a proximity dummy pattern, which does not contribute to a logical function of the semiconductor integrated circuit, in the one of the plurality of layers,
• wherein the proximity dummy patterns in the plurality of proximity dummy cells arranged along the peripheral side form, in the one of the plurality of layers, a line-and-space repetition structure extending along the peripheral side and including two or more pairs of lines and spaces between the lines in every 8×λ at any position within the proximity dummy region.

A photomask comprising a mask pattern for forming one of a plurality of layers in a layout structure of a semiconductor integrated circuit by producing a reduced image of the mask pattern on a semiconductor substrate using an exposing light having a wavelength of λ, the layout structure comprising:

• an internal circuit region including a cell array formed by arranging a plurality of unit cells in rows and columns, an outer perimeter of the internal circuit region having an internal side;
• a peripheral circuit region formed by arranging a plurality of peripheral circuit cells along the internal side, each of the plurality of peripheral circuit cells being different from any of the plurality of unit cells and including a peripheral circuit pattern in the one of the plurality of layers, an outer perimeter of the peripheral circuit region having a peripheral side that does not face the internal side;
• and
• a proximity dummy region formed by arranging a proximity dummy cell along the peripheral side, the proximity dummy cell having a proximity dummy pattern, which does not contribute to a logical function of the semiconductor integrated circuit, in the one of the plurality of layers, wherein:
• the plurality of peripheral circuit patterns in the peripheral circuit cells arranged along the internal side and the proximity dummy pattern in the proximity dummy cell arranged along the peripheral side form, in the one of the plurality of layers, a continuous line-and-space repetition structure including lines and spaces between the lines;
• and
• the line-and-space repetition structure includes one of the lines, in each of the peripheral circuit region and the proximity dummy region, within 4×λ from a first one of the lines in the peripheral circuit region closest to the peripheral side.