Automated integrated circuit device manufacturing facility using central control
AssigneeAdvanced Micro Devices, Inc.
InventorRichard J. Markle
Life of this patent
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Abstract
The present invention provides a method, an apparatus, and an automated semiconductor fabrication facility for determining control information based on global goals of a semiconductor manufacturing facility. The method includes accessing information indicative of at least one global goal of a semiconductor manufacturing facility, determining control information based on the at least one global goal, and providing a portion of the control information to each of a plurality of control units. Each of the plurality of control units is configured to control a corresponding manufacturing activity based on the provided portion of the control information.
Claims25
A method, comprising:
- accessing information indicative of at least one global goal of a semiconductor manufacturing facility;
- determining control information based on said at least one global goal;
- and
- providing a portion of the control information to each of a plurality of control units, each of the plurality of control units being configured to control a corresponding manufacturing activity based on the provided portion of the control information.
An apparatus, comprising:
- means for accessing information indicative of at least one global goal of a semiconductor manufacturing facility;
- means for determining control information based on said at least one global goal;
- and
- means for providing a portion of the control information to each of a plurality of control units, each of the plurality of control units being configured to control a corresponding manufacturing activity based on the provided portion of the control information.
An automated semiconductor manufacturing facility, comprising:
- a plurality of control units configured to control a corresponding manufacturing activity based on control information;
- and
- a central controller configured to:
- access information indicative of at least one global goal of the semiconductor manufacturing facility;
- determine control information based on said at least one global goal;
- and
- provide the control information to at least one of the plurality of control units.
Dependencies are inferred from the claim text.