MEMS switch
AssigneeSamsung Electronics Co., Ltd.
InventorsChe-heung Kim, Hyung Choi, In-sang Song, Sang-hun Lee, Sang-wook Kwon
Life of this patent
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Abstract
A MEMS (micro electro mechanical system) switch, which includes a substrate; a fixed electrode formed on an upper side of the substrate; a signal line formed on both sides of the fixed electrode; a contact member formed on an upper side of the signal line at a distance from said fixed electrode and contacting an edging portion of the signal line; a supporting member supporting the contact member to be movable; and a moving electrode disposed on an upper side of the supporting member.
Claims25
A micro-electro mechanical system (MEMS) switch comprising:
- a substrate;
- a fixed electrode formed on an upper side of the substrate;
- a plurality of signal lines formed on both sides of the fixed electrode;
- a conductive contact member formed on an upper side of the signal line at a distance in parallel with the signal lines;
- a supporting member, of which both sides are anchored on the signal lines, supporting the contact member to be movable;
- and
- a moving electrode disposed on an upper side of the supporting member.
A micro-electro mechanical system (MEMS) switch comprising:
- a substrate;
- a fixed electrode formed on an upper side of the substrate;
- a plurality of signal lines formed on both sides of the fixed electrode;
- a plate-shaped conductive contact member formed on an upper side of the signal line at a distance;
- a bridge type supporting member, of which a plate-shaped center part to which the contact member is attached at a lower end, and both side parts in which a spring arm is formed are integrally formed;
- and
- a moving electrode disposed on an upper side of the supporting member.
Dependencies are inferred from the claim text.