Dual comb electrode structure with spacing for increasing a driving angle of a microscanner, and the microscanner adopting the same

A microscanner, comprising:

• a mirror unit capable of reflecting light;
• upper and lower substrates spaced apart from each other and disposed above and below the mirror unit, respectively;
• a support formed between the upper and lower substrates to support opposite sides of the mirror unit so that the mirror unit is suspended between the upper and lower substrates;
• a plurality of movable comb electrodes projecting from opposite sides of the mirror unit;
• and
• a plurality of upper and lower static comb electrodes, wherein the plurality of upper static comb electrodes are above the plurality of movable comb electrode when no voltage is applied to the plurality of upper static comb electrodes, the plurality of lower static comb electrodes, or the plurality of movable comb electrodes, and, wherein the plurality of lower static comb electrodes are below the plurality of movable comb electrode when no voltage is applied to the plurality of upper static comb electrodes, the plurality of lower static comb electrodes, or the plurality of movable comb electrodes,
• wherein a spacing between the plurality of upper static comb electrodes and the plurality of movable comb electrodes is different from a spacing between the plurality of lower static comb electrodes and the plurality of movable comb electrodes.