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US 7,256,980 B2Granted
Thin film capacitors on ceramic
OwnerWilliam J. Borlandinventor
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Abstract
Thin-film capacitors are formed on ceramic substrates having high capacitance densities and other desirable electrical and physical properties. The capacitor dielectrics are annealed at high temperatures.
Claims20
A method of making one or more thin-film capacitors on a substrate, comprising:
- providing a ceramic substrate having a first conductive layer thereon;
- forming a dielectric over the first conductive layer, wherein forming the dielectric comprises:
- forming a dielectric layer over the first conductive layer;
- and
- annealing at a temperature in the range of about 800° C. to 1050° C. and in an environment having an oxygen partial pressure of less than 10−6 atmospheres;
- and
- forming a second conductive layer over the dielectric, wherein the first conductive layer, the dielectric, and the second conductive layer form a capacitor.
4 more elements
A method of making one or more thin-film capacitors on a substrate, comprising:
- providing a ceramic substrate having a first conductive layer thereon;
- forming a dielectric over the first conductive layer, wherein forming the dielectric comprises:
- forming a dielectric layer over the first conductive layer;
- annealing at a temperature of at least about 800° C.;
- and
- re-oxygenating the dielectric resulting from the annealing at a temperature in the range of 450° C. to 600° C. and an oxygen partial pressure in the range of 10−2 to 10−5 atmospheres;
- and
- forming a second conductive layer over the dielectric, wherein the first conductive layer, the dielectric, and the second conductive layer form a capacitor.
5 more elements
Dependencies are inferred from the claim text.