Micro-actuator, head gimbal assembly, disk drive unit and manufacturing method thereof
AssigneeSAE Magnetics (H.K.) Ltd.
InventorsMing Gao Yao, Masashi Shiraishi
Life of this patent
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Abstract
A head gimbal assembly (HGA) including a slider, a micro-actuator and a suspension to load the slider and the micro-actuator. The micro-actuator includes a support base and a piezoelectric unit used for both position displacement adjustment and flying height adjustment. The support base includes a base, a moving plate, and a leading beam to connect with the base and the moving plate. The invention also discloses a method of manufacturing such micro-actuator and HGA, and a structure of a disk drive having the micro-actuator and HGA.
Claims25
A head gimbal assembly comprising:
- a slider;
- a micro-actuator;
- and
- a suspension to load the slider and the micro-actuator;
- wherein
- the micro-actuator comprises a support base and a piezoelectric unit used for both position displacement adjustment and flying height adjustment, and the piezoelectric unit comprises three piezoelectric elements, two of which are used for position displacement adjustment, and the third one is used for flying height adjustment.
A method of forming a head gimbal assembly comprising the steps of:
- (1) forming a slider, a suspension and a micro-actuator;
- and
- (2) coupling the micro-actuator to the suspension physically and electrically, and bonding the slider with the micro-actuator and the suspension electrically and physically;
- coupling the slider to the micro-actuator physically and electrically, and bonding the micro-actuator and the slider with the suspension electrically and physically;
- wherein
- forming the micro-actuator comprises the steps of:
- forming a piezoelectric unit for both position displacement adjustment and flying height adjustment, wherein
- forming the piezoelectric unit comprises forming three piezoelectric elements, two of which are used for position displacement adjustment and the third one is used for flying height adjustment;
- forming a support base to support the piezoelectric unit;
- and
- bonding a piezoelectric unit to the support base.
A micro-actuator comprises:
- a piezoelectric unit used for both position displacement adjustment and flying height adjustment;
- and
- a support base to support the piezoelectric unit, wherein the piezoelectric unit comprises three piezoelectric elements, two of which are used for position displacement adjustment, and the third one is used for flying height adjustment.
A method of forming a micro-actuator comprises the steps of:
- forming a piezoelectric unit for both position displacement adjustment and flying height adjustment;
- forming a support base;
- bonding the piezoelectric unit to one side of the support base, wherein
- forming the piezoelectric unit comprises forming two piezoelectric elements used for position displacement adjustment and a piezoelectric element for flying height adjustment.
A disk drive unit comprising:
- a head gimbal assembly comprising a slider, a micro-actuator, and a suspension;
- a drive arm to connect with the head gimbal assembly;
- a disk;
- and
- a spindle motor to spin the disk;
- wherein the micro-actuator comprises:
- a piezoelectric unit used for both position displacement adjustment and flying height adjustment, wherein the piezoelectric unit comprises three piezoelectric elements, two of which are used for position displacement adjustment, and the third one is used for flying height adjustment;
- and
- a support base to support the piezoelectric unit.
Dependencies are inferred from the claim text.