Double-electret mems actuator
AssigneeUni-Pixel Displays, Inc.
InventorMartin G. Selbrede
Life of this patent
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AssigneeUni-Pixel Displays, Inc.
InventorMartin G. Selbrede
Estimating the term…
An actuator (100) taking advantage of ponderomotive forces to enhance its electromechanical performance as a function of input energy. An actuator (100) may include a first conductive layer (102) residing on a first electret layer (101). The actuator (100) may further include a moveable second electret layer (103) which is spaced apart in relation to the first conductive layer (102) when the second electret layer (103) is in a quiescent state. The actuator (100) may further include a second conductive layer (104) in a spaced apart relation to the second electret layer (103) when the second electret layer (103) is in the quiescent state. The actuator (100) may further include a voltage source (105) configured to selectively apply a voltage between the first (102) and second (104) conductive layers thereby propelling the second electret layer (103) to either the first (102) or second (104) conductive layer.
An actuator, comprising:
An actuator, comprising:
An actuator, comprising:
Dependencies are inferred from the claim text.